Deulin E.A. et al. Mechanics and Physics of Precise Vacuum Mechanisms

Springer, 2010. — 234 p. — ISBN: 9048125197.In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way.Using Precise Mechanisms in Modern Vacuum Technological Equipment
Typical Vacuum Mechanisms
Friction in Vacuum
Matrix Method of the Design of New Mechanisms Structure
Precision of Vacuum Mechanisms
Vacuum Mechanisms of Nanoscale Precision
Ultrahigh Vacuum Rotary-Motion Feedthroughs
Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs
Vacuum Frictionless Mechanisms
Flow of Microparticles Originating from Mechanisms in Vacuum