Leach R. Fundamental Principles of Engineering Nanometrology

Elsevier Inc. 2010, 349 p.Introduction to metrology for micro- and nanotechnology.
Some basics of measurement.
Precision measurement instrumentation – some design principles.
Length traceability using interferometry.
Displacement measurement.
Surface topography measurement instrumentation.
Scanning probe and particle beam microscopy.
Surface topography characterisation.
Coordinate metrology.
Mass and force measurement.