Mattox Donald M. SVC Educational Guide to Vacuum Coating Processing

Society of Vacuum Coaters, 2002.This publication containes individual, stand-alone, two-page guides (or worksheets) on different aspects of the equipment technology associated with vacuum coating prosesses.Material science
Vacuum technology
Plasma technology
Surface preparation
Vacuum evaporation
Sputter deposition
Arc vapor deposition
Ion planting
Low-pressure CVD and PECVD
Atomistic film growth and resultin film properties
Surface and film characterization
Applications
Safety