Madou M.J. Fundamentals of Microfabrication and Nanotechnology. Volume III: From MEMS to Bio-MEMS and Bio-NEMS. Manufacturing Techniques and Applications

3rd Edition. – Taylor & Francis Group, LLC, CRC Press, Boca Raton, FL, USA, 2011. – 642 p. – ISBN13: 978-1-4398-9524-5From MEMS to Bio-MEMS: Manufacturing Techniques and Applications consists of ten chapters in three parts. In Part I, we compare available manufacturing options for microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), introduce inspection options for the produced parts (metrology), and summarize available modeling software for MEMS and NEMS.
Of the three chapters in Part II, the first deals with scaling laws, the second with actuators, and the third with issues surrounding power generation and the implementation of brains in miniaturized devices. In Part III, Chapter 10, we review the MEMS and NEMS markets. Today, the MEMS field has made the transition out of the laboratory and into the marketplace with a plethora of new products, including a strong entry into the consumer electronics field (mobile phones, cameras, laptop computers, games, etc.). If MEMS is entering adolescence, the word nano still seems to derive from a verb that means “to seek and get venture capital funding” instead of from the Greek noun for dwarf. Today, the market dynamics for MEMS and NEMS commercial products are very different, and we treat MEMS and NEMS applications separately in this chapter.
Bio-NEMS: Manufacturing Techniques and Applications represents the third and final volume in this set. The other two volumes include Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology and Manufacturing Techniques for Microfabrication and Nanotechnology. Cross-references to these books appear throughout the text and will be referred to as Volume I and Volume II, respectively.From traditional Manufacturing to Nanotechnology
Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional)
Manufacturing Compared
Nature as an Engineering Guide: Biomimetics
Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared
Packaging, Assembly, and Self-Assembly
Selected Materials and Processes for MEMS and NEMS
Metrology and MEMS/NEMS Modeling
Scaling Laws, actuators, and Power and Brains in Miniature Devices
Scaling Laws
Actuators
Power and Brains in Miniature Devices
Miniaturization application
MEMS and NEMS Applications