Hoffman D.M., Singh B., Thomas J.H. (eds.) Handbook of Vacuum Science and Technology

Academic Press, 1997. San Diego, London, New York, Tokyo, Toronto. - XXII, 839 p. ISBN: 0-12-352065-7.Fundamentals of Vacuum Technology and Surface Physics.
Creation of Vacuum.
Vacuum Measurements.
System Design and Components.
Vacuum Applications.
Large-Scale Vacuum Based Processes.Publisher's review
The Handbook of Vacuum Science and Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner.Key Features* User oriented with many useful tables, charts, and figures of use to the practitioner
* Reviews new vacuum materials and equipment
* Illustrates the design and maintenance of modern vacuum systems
* Includes well referenced chapters